Diagonal control design for atomic force microscope piezoelectric tube nanopositioners
نویسندگان
چکیده
منابع مشابه
Diagonal control design for atomic force microscope piezoelectric tube nanopositioners.
Atomic Force Microscopes (AFM) are used for generating surface topography of samples at micro to atomic resolutions. Many commercial AFMs use piezoelectric tube nanopositioners for scanning. Scanning rates of these microscopes are hampered by the presence of low frequency resonant modes. When inadvertently excited, these modes lead to high amplitude mechanical vibrations causing the loss of acc...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2013
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.4790474